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Effect of pore generating materials on the electrical and mechanical properties of porous low-k films

✍ Scribed by Suhan Kim; Kookheon Char; Junhee Hahn; Jin-Kyu Lee; Do Yeung Yoon; Hee-Woo Rhee; Moon Young Jin

Publisher: The Polymer Society of Korea
Year: 2007
Tongue: English
Weight: 575 KB
Volume: 15
Category: Article
ISSN: 1598-5032
DOI: 10.1007/bf03218744

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