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Effect of Oxygen Plasma Treatment on SiO2 Aerogel Films

✍ Scribed by H.-H. Park; M.-H. Jo; H.-R. Kim; S.-H. Hyun

Book ID
110239566
Publisher
Springer
Year
1998
Tongue
English
Weight
145 KB
Volume
17
Category
Article
ISSN
0261-8028

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SiO aerogel film has a promising property as intermetal dielectrics (IMD) for its low dielectric constant. 2 However, a stable and porous SiO aerogel film was not properly synthesized due to the rapid evaporation of 2 solvent during spin coating even in a solvent saturated atmosphere. So less evapor