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Effect of nitrogen ion bombardment at copper-alumina interface

โœ Scribed by Varsha P. Bhattacharyya; K.W. Phadke; P.D. Prabhawalkar


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
981 KB
Volume
40
Category
Article
ISSN
0042-207X

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On the segregation of Ca at SiO2/Si inte
โœ Deenapanray, Prakash N. K.; Petravic, Mladen ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 128 KB

Segregation of Ca in Si has been studied using SIMS and RBS. Pronounced Ca profile broadening is observed during SIMS measurements with oxygen ions under bombardment conditions, yielding the formation of a stoichiometric oxide layer at the surface. Additional profiling through the SiO 2 /Si interfac