Effect of nitrogen content on phase configuration, nanostructure and mechanical behaviors in magnetron sputtered SiCxNy thin films

✍ Scribed by J.P. Wang; Y.H. Lu; Y.G. Shen

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 787 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.10.044