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Effect of nitriding temperature in a glow discharge on the thickness and composition of the nitride zone

โœ Scribed by N. N. Martovitskaya; T. S. Tonchev


Publisher
Springer US
Year
1985
Tongue
English
Weight
477 KB
Volume
27
Category
Article
ISSN
0026-0673

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Although chromium nitride (CrN) coatings are an industry standard for hard wear-resistant thin films, methods of improving/modifying film properties are still being sought therefore this study has investigated the effects of N2 flow and bias pulsing. Chromium nitride can exist in two stable forms, C