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Effect of N2O on high-rate homoepitaxial growth of CVD single crystal diamonds

✍ Scribed by Y. Su; H.D. Li; S.H. Cheng; Q. Zhang; Q.L. Wang; X.Y. Lv; G.T. Zou; X.Q. Pei; J.G. Xie


Book ID
116630290
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
666 KB
Volume
351
Category
Article
ISSN
0022-0248

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## Abstract Diamond films were synthesized with up to 50% argon in the gas phase using high power plasma‐assisted chemical vapour deposition (PACVD). This resulted in a strong increase of the deposition rates. Polycrystalline diamond (PCD) films grown with Ar have shown a higher incorporation of sp