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Effect of methane concentrations on surface morphologies and surface structures of (001) homoepitaxial diamond thin films

โœ Scribed by Lee, Naesung; Badzian, Andrzej


Book ID
120387616
Publisher
American Institute of Physics
Year
1995
Tongue
English
Weight
485 KB
Volume
67
Category
Article
ISSN
0003-6951

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Several kinds of (100) surfaces of homoepitaxial diamond films doped with boron are investigated. The valence band maximum at the surface and electronic affinity are measured using ultraviolet and X-ray photoelectron spectroscopies. In p-type doped films, resistivity measurements indicate that the b