Effect of mesa shape on the planarity of InP regrowths performed by atmospheric pressure and low pressure selective metalorganic vapor phase epitaxy

✍ Scribed by J.L. Zilko; B.P. Segner; U.K. Chakrabarti; R.A. Logan; J. Lopata; D.L. Van Haren; J.A. Long

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 801 KB
• Volume: 109
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(91)90188-b