✦ LIBER ✦
Effect of mechanical stress for thin SiO2 films in TDDB and CCST characteristics : Y. Ohno, A. Ohsaki, T. Kaneoka, J. Mitsuhashi, M. Hirayama and T. Kato. 27th a. Proc. IEEE/IRPS Int. Reliab. Phys. Symp., 34 (1989)
- Book ID
- 103285519
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 127 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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