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Effect of ion irradiation on the structure of AuNi multilayers

✍ Scribed by F. Tamisier; C. Jaouen; Ph. Guérin; G. Gladyszewski

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
417 KB
Volume
275
Category
Article
ISSN
0040-6090

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On the ion irradiation stability of Al/T
On the ion irradiation stability of Al/Ti versus AlN/TiN multilayers
✍ D. Peruško; M.J. Webb; V. Milinović; B. Timotijević; M. Milosavljević; C. Jeynes 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 283 KB

A comparative study of the structural changes induced in Al/Ti and AlN/TiN multilayers by argon ion irradiation is presented. The layers were deposited on Si substrates, by ion sputtering in case of pure metals, and reactive ion sputtering in case of metal-nitrides, to a total thickness of $270 nm.