Effect of ion-beam treatment during reactive high-frequency magnetron sputtering on macrostresses in ITO films

✍ Scribed by Krylov, P. N.; Zakirova, R. M.; Fedotova, I. V.

• Book ID: 125394924
• Publisher: Springer
• Year: 2014
• Tongue: English
• Weight: 189 KB
• Volume: 48
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/S1063782614060177