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Effect of interfacial fluorination on the electrical properties of the inter-poly high-k dielectrics

✍ Scribed by Chih-Ren Hsieh; Yung-Yu Chen; Kwung-Wen Lu; Gray Lin; Jen-Chung Lou


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
390 KB
Volume
88
Category
Article
ISSN
0167-9317

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