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Effect of illumination on hydrogenated amorphous silicon thin films doped with chalcogens

✍ Scribed by S.K. Sharma; Krishnankutty-Nair P. Kumar; K.J. Kang; R.M. Mehra

Book ID
116671824
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
635 KB
Volume
355
Category
Article
ISSN
0022-3093

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## Abstract The synthesis of nanostructured hydrogenated amorphous carbon (a‐C:H) films doped with nitrogen using microwave‐assisted surface wave plasma chemical vapour deposition on quartz and p‐silicon substrates is reported. By controlling the deposition parameters, the Tauc band gap has been va