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Effect of hydrogen peroxide on hydrofluoric acid etching of high-k materials: ESR investigations

✍ Scribed by V. Lowalekar; S. Raghavan

Book ID: 116668525
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 218 KB
Volume: 351
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2005.03.034

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