Effect of high substrate bias and hydrogen and nitrogen incorporation on spectroscopic ellipsometric and atomic force microscopic studies of tetrahedral amorphous carbon films

✍ Scribed by O.S. Panwar; Mohd. Alim Khan; Satyendra Kumar; A. Basu; B.R. Mehta; Sushil Kumar; Ishpal

• Book ID: 108278710
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 1010 KB
• Volume: 205
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2010.08.119