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Effect of High-Energetic Particles on Thin Film Growth Due to Thermal Spikes

✍ Scribed by Bobeth, M. ;Pompe, W.

Book ID: 105381777
Publisher: John Wiley and Sons
Year: 1990
Tongue: English
Weight: 681 KB
Volume: 117
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211170120

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