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Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films

✍ Scribed by Ying Yang; Shengsheng Zhao; Jun Gong; Xin Jiang; Chao Sun


Book ID
117695120
Publisher
Allerton Press Inc
Year
2011
Tongue
English
Weight
864 KB
Volume
27
Category
Article
ISSN
1005-0302

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πŸ“œ SIMILAR VOLUMES


Effect of deposition processes on residu
✍ Sheng-Sheng Zhao; Ying Yang; Jia-Bao Li; Jun Gong; Chao Sun πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 815 KB

The effect of deposition processes on the distribution of residual stresses in the thickness of the (Ti,Al)N films prepared by arc ion plating (AIP) was investigated in the present work, which indicates that the stress distribution exhibits a "bell" shape and the maximum compressive stress appears i

Heat treatment of thin carbon films and
✍ Craig A. Taylor; Mark F. Wayne; Wilson K.S. Chiu πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 308 KB

Thin carbon films are used to hermetically seal and improve the performance of devices exposed to extreme conditions. Such films, which are deposited by chemical vapor deposition, develop residual thermal stresses due to a mismatch in the coefficient of thermal expansion between the film and substra