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Effect of fluorine on moisture absorption and dielectric properties of SiOF films

✍ Scribed by Seoghyeong Lee; Jong-Wan Park

Book ID: 114194112
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 436 KB
Volume: 53
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(97)02067-1

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