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Effect of finite thickness of magnetic substrate on planar inductors

✍ Scribed by Roshen, W.A.


Book ID
114549236
Publisher
IEEE
Year
1990
Tongue
English
Weight
561 KB
Volume
26
Category
Article
ISSN
0018-9464

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## Abstract In this paper, the effects of the thickness of silicon substrate with backside metalization on inductor performance are investigated, and the experimental results show that thinner substrate with backside metalization results in smaller inductance, lower quality factor, and slightly hig