Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470

✍ Scribed by Q. Huang; A.S. Tan; J.M. Tan; I.S. Goh; Z.Z. Dong; C.K. Ong; T. Osipowicz

• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 203 KB
• Volume: 76
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-002-1911-9