Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications

✍ Scribed by J. W. Leem; Y. M. Song; Y. T. Lee; J. S. Yu

• Publisher: Springer
• Year: 2010
• Tongue: English
• Weight: 874 KB
• Volume: 100
• Category: Article
• ISSN: 0721-7269
• DOI: 10.1007/s00340-010-4128-1