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Effect of energy loss in the simulation of slow ion scattering by a solid surface

✍ Scribed by K. Khalal-Kouache; B. Aissous; A. Mekhtiche; A.C. Chami


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
153 KB
Volume
266
Category
Article
ISSN
0168-583X

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Solid phase epitaxial regrowth of amorph
✍ S. Ruffell; I.V. Mitchell; P.J. Simpson πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 210 KB

Medium energy ion scattering (MEIS) has been used to study the kinetics of solid phase epitaxial regrowth (SPEG) of ultrathin amorphous layers created by room temperature implantation of 5 keV energy phosphorus ions into Si(1 0 0). P ion fluences ranged from 5e14 cm Γ€2 up to 1e16 cm Γ€2 , the associa