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Effect of Elastic Stress Field on Diffusion

โœ Scribed by Nazarov, Andrei V.; Miheev, A.A.


Book ID
120402878
Publisher
Trans Tech Publications, Ltd.
Year
1997
Tongue
English
Weight
449 KB
Volume
143-147
Category
Article
ISSN
1662-9507

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The electromagnetic field of lasers and non-equilibrium doping conditions enable laser doping of SiC with increased dopant diffusivity. Chromium, which acts as a double acceptor, has been laser-doped in SiC wafers. A thermal model is utilized to determine the temperature distribution at various dept