✦ LIBER ✦
Effect of dynamic precursor gas pressure on growth behavior of amorphous Si–C–O nanorods by electron beam-induced deposition
✍ Scribed by Wei Zhang; Massayuki Shimojo; Kazuo Furuya
- Book ID
- 106393864
- Publisher
- Springer
- Year
- 2008
- Tongue
- English
- Weight
- 228 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0022-2461
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