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Effect of downscaling nano-copper interconnects on the microstructure revealed by high resolution TEM-orientation-mapping

✍ Scribed by Ganesh, K J; Darbal, A D; Rajasekhara, S; Rohrer, G S; Barmak, K; Ferreira, P J


Book ID
117992971
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
723 KB
Volume
23
Category
Article
ISSN
0957-4484

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