✦ LIBER ✦
Effect of diluent gas on silicon film deposition from a free jet of monosilane-diluent mixture activated by electron-beam plasma
✍ Scribed by S. Ya. Khmel
- Book ID
- 114994181
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2012
- Tongue
- English
- Weight
- 634 KB
- Volume
- 21
- Category
- Article
- ISSN
- 1810-2328
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