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Effect of crystallographic orientation of Si substrates on SPE NiSi2 formation

✍ Scribed by S. Yamauchi; M. Hirai; M. Kusaka; M. Iwami; H. Nakamura; Y. Yokota; H. Watabe


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
705 KB
Volume
70-71
Category
Article
ISSN
0169-4332

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