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Effect of Cr implantation on structural and optical properties of AlN thin films

✍ Scribed by A. Shah; Arshad Mahmood


Book ID
116834134
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
958 KB
Volume
407
Category
Article
ISSN
0921-4526

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Structural and optical properties of Er
✍ M.J. Soares; J.P. LeitΓ£o; M.I.N. da Silva; J.C. GonzΓ‘lez; F.M. Matinaga; K. Lore πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 703 KB

In this work erbium ions were implanted into AlN films grown on sapphire with fluence range: (0.5-2) Γ‚ 10 15 at/cm Γ€2 , ion energy range: 150-350 keV and tilt angle: 0Β°, 10Β°, 20Β°, 30Β°. The optical and structural properties of the films are studied by means of photoluminescence and Raman spectroscopy