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Effect of contamination reactions on the composition and mechanical properties of magnetron sputtered TiN coatings

✍ Scribed by S. Berg; N. Eguchi; V. Grajewski; S.W. Kim; E. Fromm


Book ID
107930131
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
639 KB
Volume
49
Category
Article
ISSN
0257-8972

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