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Effect of Composition in Ternary La–Al–O Films on Flat-Band Voltage for Application to Dual High- k Gate Dielectric Technology

✍ Scribed by Suzuki, Masamichi; Koyama, Masato; Kinoshita, Atsuhiro


Book ID
120155933
Publisher
Institute of Pure and Applied Physics
Year
2009
Tongue
English
Weight
197 KB
Volume
48
Category
Article
ISSN
0021-4922

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