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Effect of catch cup geometry on 3D boundary layer flow over the wafer surface in a spin coating

✍ Scribed by Mizue Munekata; Seiichi Kimura; Hiroaki Kurishima; Jinsuke Tanaka; Sohei Yamamoto; Hiroyuki Yoshikawa; Kazuyoshi Matsuzaki; Hideki Ohba

Book ID
107432744
Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
185 KB
Volume
17
Category
Article
ISSN
1003-2169

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