The effect of relative humidity on frict
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Yasuhisa Ando
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Article
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2000
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Elsevier Science
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English
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The friction and pull-off forces were measured between atomic force microscope AFM probe and submicron-size asperity arrays on ลฝ . a silicon wafer in various relative humidities. First, a focused ion beam FIB was used to produce two-dimensional arrays in which asperities were arranged at uniform int