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Effect of brightener on copper plating: In situ investigation by the PAS technique

✍ Scribed by Sachio Yoshihara; Masahide Ueno; Yasuo Nagae; Akira Fujishima


Publisher
Elsevier Science
Year
1988
Weight
257 KB
Volume
243
Category
Article
ISSN
0022-0728

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An In situ PAS (Photo-Acoustic Spectroscopy) technique using a piezoelectric transducer as its detector has been applied to study the plating of copper. The surface structures of the plated Cu under different current densities were monitored in situ by PAS . The smoothing effect of a brightener was

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