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Effect of biaxial stress on Si(100) inversion layers

โœ Scribed by Frank F. Fang

Publisher
Elsevier Science
Year
1980
Weight
54 KB
Volume
98
Category
Article
ISSN
0167-2584

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The paper presents the results of the study of elastic interaction and clustering of vacancies in Si 75 Ge 25 and Si 50 Ge 50 alloys under plane stress loading, as appropriate to thin SiGe layers grown coherently on top of a bulk silicon substrate. The first-principles calculation of the total energ