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Effect of bias voltage on A1N thin films prepared by electron shower method

✍ Scribed by M. Ishihara; H. Yumoto; T. Tsuchiya; K. Akashi


Book ID
113205319
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
506 KB
Volume
281-282
Category
Article
ISSN
0040-6090

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