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Effect of Ar+, N2+, He+ and H2+ bombardment on the composition and structure of CNx layers

✍ Scribed by I Bertóti; M Mohai; A Tóth; B Zelei

Book ID: 114170782
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 164 KB
Volume: 148
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00839-8

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