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Effect of applying ultrasonic vibration in thermal nanoimprint lithography

✍ Scribed by Harutaka Mekaru; Toshihiko Noguchi; Hiroshi Goto; Masaharu Takahashi

Book ID
106185406
Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
799 KB
Volume
14
Category
Article
ISSN
0946-7076

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Thermoplastics are commonly used in thermal nanoimprint lithography (NIL) but their high viscosity leads to inhomogeneities of residual thickness in patterns with various densities. Monomers exhibit low viscosity and are imprinted easily and polymerized with UV-NIL processes. These monomers can be a