✦ LIBER ✦
Effect of annealing time on Si/SiO2 interface property for CMOS fabricated on hybrid orientation substrate with ATR method
✍ Scribed by Po Chin Huang; San Lein Wu; Shoou Jinn Chang; Yao Tsung Huang; Chien Ting Lin; Mike Ma; Osbert Cheng
- Book ID
- 113783983
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 579 KB
- Volume
- 126
- Category
- Article
- ISSN
- 0254-0584
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