Mixed ZnO-ZrO 2 films have been obtained by sol-gel technology. By using spin coating method, the films were deposited on Si and glass substrates. The influence of thermal annealings (the temperatures vary from 400 °C to 750 °C) on their structural properties has been studied. The structural behavio
Effect of annealing temperature of a novel Sol–gel process on the electrical properties of low voltage ZnO-based ceramic films
✍ Scribed by Shenglin Jiang; Haibo Zhang; Yanqiu Huang; Meidong Liu; Ruzhan Lin
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 187 KB
- Volume
- 117
- Category
- Article
- ISSN
- 0921-5107
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✦ Synopsis
The effect of annealing temperature on the electrical properties of low voltage ZnO-based ceramic films was studied by a novel sol-gel process. The experiment results show that Zn 7 Sb 2 O 12 and ZnCr 2 O 4 phase can form in a lower annealing temperature (550 • C) by the solution doping, and the pyrochlore phase is not detected by X-ray diffractometer (XRD) from 550 • C to 950 • C. Sb 2 O 3 phase can change to spinel phase completely; Bi 2 O 3 and ZnO may be vaporized when the annealing temperature reaches 750 • C. The ZnO-based ceramic films with nonlinear coefficient of 20, nonlinear voltage of 5 V and the leakage current density of 0.5 A/mm 2 can be gained at the proper annealing temperature.
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