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Effect of an inter-electrode distance in VHF-PECVD and gas flow ratios on a-SiGeC:H films and solar cells by using monomethyl germane as a germanium source

✍ Scribed by Do Yun Kim; Tomohiro Yoshihara; Sichanugrist Porponth; Makoto Konagai


Book ID
119301121
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
949 KB
Volume
358
Category
Article
ISSN
0022-3093

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