Effect of an a-Si layer on the superconducting properties of high-Tc YBCO-films

✍ Scribed by M. Serwe; G. Schulz; K. Petersen; H. Adrian; R. Fischer

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 410 KB
• Volume: 213
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/0921-4534(93)90454-x

✦ Synopsis

Results of the deposition of a-Si onto YBa2Cu307_ x thin films are reported. The silicon was grown by plasma enhanced chemical vapour deposition at low substrate temperature (300°C). With this deposition process the critical temperature of the superconductor remained almost constant but the critical current was reduced by nearly one order in magnitude. X-ray 20-scans exhibited highly oriented films and SEM studies showed that the a-Si film smoothed the YBa2Cu307_x surface with no observable crack formation. An interface layer with a maximum width of 30 nm was deduced from ESCA depth profiles.