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Effect of acoustic fatigue on the concentration of vacancies in copper

โœ Scribed by A. G. Dovgyallo; S. V. Dezhkunova; I. G. Dovgyallo; Yu. N. Presman

Publisher
Springer US
Year
1989
Tongue
English
Weight
209 KB
Volume
31
Category
Article
ISSN
0026-0673

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## Abstract The effect of vacancies induced by the prior rapid thermal processing (RTP) at 900โ€“1200 ยฐC in Ar on copper (Cu) precipitation in nโ€type silicon has been investigated by means of optical microscopy and transmission electron microscopy. It was revealed that in the sample without the prior