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Effect of a shaped magnetic field on Czochralski silicon growth

✍ Scribed by R.W. Series


Book ID
107790256
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
631 KB
Volume
97
Category
Article
ISSN
0022-0248

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Effects of various magnetic field config
✍ O. GrΓ€bner; G. MΓΌller; J. Virbulis; E. Tomzig; W.v. Ammon πŸ“‚ Article πŸ“… 2001 πŸ› Elsevier Science 🌐 English βš– 700 KB

Magnetic fields are of growing interest for improvement of the silicon Czochralski crystal growth process. The use of steady magnetic fields provides suppression of turbulent fluctuations due to their damping action on the melt flow. Recent literature data on magnetic fields show that a relatively l