✦ LIBER ✦
Effect of a bell-shaped cover in spin coating process on final film thickness
✍ Scribed by M. Pannek; T. Dunkel; D. W. Schubert
- Publisher
- Maney Publishing
- Year
- 2001
- Tongue
- English
- Weight
- 88 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1432-8917
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