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Effect of 6H-SiC crystal growth shapes on thermo-elastic stress in the growing crystal

✍ Scribed by Yong-gui Shi, Pei-yun Dai, Jian-feng Yang, Zhi-hao Jin, Hu-lin Liu

Book ID: 113107926
Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 404 KB
Volume: 19
Category: Article
ISSN: 1674-4799
DOI: 10.1007/s12613-012-0604-4

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