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EEDF Measurements in the Diffusion-extraction Region of a Plasma in ARIS (Applied Radio-frequency Ion Source)

✍ Scribed by F. Soberón; A. R. Ellingboe


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
171 KB
Volume
44
Category
Article
ISSN
0005-8025

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