✦ LIBER ✦
ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - (Invited) Low Temperature Atomic Layer Deposition of Ru Thin Films with Enhanced Nucleation Using Various Ru(0) Metallorganic Precursors and Molecular O
✍ Scribed by Kim, Soo-Hyun
- Book ID
- 123609597
- Publisher
- ECS
- Year
- 2011
- Weight
- 432 KB
- Category
- Article
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