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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Interface Reaction and Rate Enhancement of SiGe Thermal Oxidation

✍ Scribed by Shimura, Takayoshi; Okamoto, Yuki; Shimokawa, Daisuke; Inoue, Tomoyuki; Hosoi, Takuji; Watanabe, Heiji


Book ID
124073007
Publisher
ECS
Year
2010
Weight
402 KB
Category
Article

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