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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Oxidation of Suspended Stacked Silicon Nanowire for Sub-10nm Cross-Section Shape Optimization

✍ Scribed by Hubert, Alexandre; Colonna, Jean-Philippe; Bécu, Stéphane; Dupré, Cécilia; Maffini-Alvaro, Virginie; Hartmann, Jean-Michel; Pauliac, Sébastien; Vizioz, Christian; Aussenac, François; Carabasse, Catherine; Delaye, Vincent; Ernst, Thomas; Deleonibus, Simon

Book ID: 126306075
Publisher: ECS
Year: 2008
Weight: 595 KB
Volume: 13
Category: Article
DOI: 10.1149/1.2911500

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