✦ LIBER ✦
[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Innovative Low damage Silicon Nitride Passivation of 100nm In0.45AlAs/In0.4GaAs Metamorphic HEMTs with Remote ICPCVD
✍ Scribed by Kim, Donghwan; Maeng, Jimin; Kim, Sungwon; Her, Jincherl; Yeon, Seongjin; Kim, Harqkyun; Seo, Kwangseok
- Book ID
- 121350171
- Publisher
- ECS
- Year
- 2007
- Weight
- 806 KB
- Volume
- 6
- Category
- Article
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